Figure 2
SEM images of the SiNC/PEDOT:PSS solar cell at various stages of the fabrication process. (a) Monolayer PS nanospheres prepared on a Si substrate. (b) PS nanospheres after the O2 etching process. (c) Formation of periodic nanocones after the Cl2 plasma etching process. (d) Top and (e) side views of the SiNCs after the removal of the nanospheres. (f) PEDOT:PSS layer spin-coated on the nanocones. The scale bar is 400 nm.