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Table 2 The atomic percentage (at.%) before and after functionalization

From: DNA-functionalized silicon nitride nanopores for sequence-specific recognition of DNA biosensor

Number

C (at.%)

N (at.%)

O (at.%)

Si (at.%)

S (at.%)

P (at.%)

Ga (at.%)

1#

-

42.50

0.98

56.53

-

-

-

2#

9.89

51.77

3.40

34.39

-

-

0.54

3#

50.24

24.79

8.39

15.17

1.17

-

0.24

4#

13.63

46.27

9.16

29.58

1.28

0.08

-

  1. 1#, before the functionalization; 2#, functionalized with 3-APTES; 3#, treated with cross-linker, 4#, DNA modified; at.%, atomic percent.

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