Fig. 1From: Gold Nanohole Array with Sub-1 nm Roughness by Annealing for Sensitivity Enhancement of Extraordinary Optical Transmission BiosensorSchematic diagram of NHA fabrication through a double liftoff process. a E-beam exposure, b development and Cr deposition, c first liftoff process, d CF4 RIE followed by O2 RIE, e 100-nm gold deposition and second liftoff process, and f final NHA structureBack to article page