Table 1 Simulation and experimental FWHM, surface (monolayer target molecule coverage) sensitivity, and FOM of the NHA sensor before and after annealing. The annealed and as-fabricated NHAs having the same hole diameters of 209 and 150 nm are selected for comparison
| Hole diameter | Simulation | Experiment (Δn = 0.48) | ||
|---|---|---|---|---|
| FWHM (nm) | FWHM (nm) | Surface sensitivity (nm/RIU) | FOM (/RIU) | |
| Before annealing | ||||
| 209 nm | 24.6 | 77.4 | 6.0 | 0.08 |
| 150 nm | 55.4 | 64.2 | 6.7 | 0.1 |
| After annealing | ||||
| 209 nm | 37.9 | 58.2 | 16.9 | 0.29 |
| 150 nm | 9.7 | 31.5 | 17.9 | 0.57 |