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Table 1 Simulation and experimental FWHM, surface (monolayer target molecule coverage) sensitivity, and FOM of the NHA sensor before and after annealing. The annealed and as-fabricated NHAs having the same hole diameters of 209 and 150 nm are selected for comparison

From: Gold Nanohole Array with Sub-1 nm Roughness by Annealing for Sensitivity Enhancement of Extraordinary Optical Transmission Biosensor

Hole diameter Simulation Experiment (Δn = 0.48)
  FWHM (nm) FWHM (nm) Surface sensitivity (nm/RIU) FOM (/RIU)
Before annealing     
  209 nm 24.6 77.4 6.0 0.08
  150 nm 55.4 64.2 6.7 0.1
After annealing     
  209 nm 37.9 58.2 16.9 0.29
  150 nm 9.7 31.5 17.9 0.57