Fig. 3From: Novel 14-nm Scallop-Shaped FinFETs (S-FinFETs) on Bulk-Si SubstrateCross-sectional TEM images of S-FinFET along different axis. a The cross-sectional views of fabricated S-Fin and conventional Fin in the inset with multi-layer HKMG stack. b The cross-sectional views of HKMG S-FinFETs with L G of 27 nm and L G of 14 nmBack to article page