Table 1 Dependence of the sputter yield of a flat surface and a NP on the cut-off energy E c for electronic stopping. Data obtained for perpendicular incidence only
E c | 0 eV | 1.5 eV | 3.9 eV | No electronic stopping |
|---|---|---|---|---|
Flat surface | 53±7 | 56±18 | 116±48 | 644±309 |
NP | 96±18 | 101±30 | 397±121 | 5096±1804 |