Table 2 The sheet resistances of copper films with different calcination parameters
Calcination temperature (°C) | Time (min) | Sheet resistance (mΩ/□) |
|---|---|---|
400 | 30 | 7.4 |
350 | 30 | 27.2 |
300 | 30 | 41.3 |
300 | 60 | 40.6 |
250 | 30 | 47.6 |
250 | 60 | 45.4 |
200 | 30 | – |
Non-calcination | 0 | – |
Calcination temperature (°C) | Time (min) | Sheet resistance (mΩ/□) |
|---|---|---|
400 | 30 | 7.4 |
350 | 30 | 27.2 |
300 | 30 | 41.3 |
300 | 60 | 40.6 |
250 | 30 | 47.6 |
250 | 60 | 45.4 |
200 | 30 | – |
Non-calcination | 0 | – |