Fig. 5From: Piezoelectric Size Effects in a Zinc Oxide MicropillarCharacterization of the ZnO film and micropillars in the size range of 1.5 and 7 μm piezoresponse: a linear fitting of the displacement vs. applied ac voltage at various pillar sizes and b piezoelectric coefficients, d33, calculated from the slopes for the ZnO micropillars in the size range of 1.5 to 7 μmBack to article page