Table 1 Growth conditions of different AlN NW samples
From: MBE Growth of AlN Nanowires on Si Substrates by Aluminizing Nucleation
Samples | Aluminization temperature (°C) | Al source temperature (°C) | N2 flow rate (sccm) | Growth temperature (°C) | Growth time (h) |
---|---|---|---|---|---|
A | N.A. | 1220 | 1.7 | 960 | 3 |
B | 850 | 1220 | 1.7 | 960 | 1 |
C | 900 | 1220 | 1.7 | 960 | 1 |
D | 950 | 1220 | 1.7 | 960 | 1 |
E | 900 | 1220 | 1.7 | 940 | 1 |
F | 900 | 1220 | 1.7 | 980 | 1 |
G | 900 | 1200 | 1.7 | 960 | 1 |
H | 900 | 1240 | 1.7 | 960 | 1 |
J | 900 | 1240 | 1.7 | 960 | 3 |
K | 900 | 1220 | 1.7 | 960 | 3 |
L | 900 | 1180 | 1.7 | 960 | 3 |
M | 900 | 1220 | 2.5 | 960 | 3 |
O | 900 | 1220 | 3.0 | 960 | 3 |
P | 900 | 1240 | 2.5 | 960 | 3 |
Q | 950 | 1240 | 2.5 | 960 | 3 |