Fig. 6From: Systematic Control of Self-Assembled Au Nanoparticles and Nanostructures Through the Variation of Deposition Amount, Annealing Duration, and Temperature on Si (111)Energy-dispersive X-ray spectroscopy (EDS) spectra of the samples with 8 nm DA in (a) and 12 nm in (b) on Si (111). Insets in (a-1) and (b-1) show the corresponding AFM top views. a-2–b-2 Enlarged spectral range between 9–11 KeV. c Evolution of the Au Mα1 peaks as a function of DABack to article page