Table 2 The Mo 3d and S 2p peak positions, atomic percentages, and x values of the TR-MoSx samples annealed at 250, 300, and 350 °C
Peak and identity | Fitting of Mo 3d and S 2p peak binding energy (eV) (atomic percentage (%)) | |||
|---|---|---|---|---|
250 °C | 300 °C | 350 °C | ||
Mo4+ 3d5/2 | MoS2 | 229.23(31.2) | 229.10(44.4) | 229.22(54.0) |
Mo4+ 3d3/2 | 232.37(18.1) | 232.24(27.6) | 232.36(32.6) | |
Mo5+ 3d5/2 | Mo2S5 | 230.18(19.2) | 230.23(9.7) | 230.10(4.2) |
Mo5+ 3d3/2 | 233.32(12.8) | 233.37(6.4) | 233.24(2.8) | |
Mo6+ 3d5/2 | MoS3 | 231.40(5.6) | 231.30(3.4) | 231.40(1.7) |
Mo6+ 3d3/2 | 234.54(3.8) | 234.44(2.3) | 234.54(1.1) | |
Mo6+ 3d5/2 | MoO3 | 232.50(5.6) | 232.50(3.7) | 232.50(2.2) |
Mo6+ 3d3/2 | 235.64(3.8) | 235.64(2.5) | 235.64(1.5) | |
S2− 2p3/2 | MoS2 | 161.76(35.7) | 161.90(51.8) | 162.05(61.7) |
S2− 2p1/2 | 162.95(17.9) | 163.09(25.9) | 163.24(30.9) | |
S2 2− 2p3/2 | – | 163.20(30.9) | 163.30(14.9) | 163.10(4.9) |
S2 2− 2p1/2 | 164.39(15.5) | 164.49(7.4) | 164.29(2.5) | |
S/Mo ratio (x values) | 2.26 | 2.19 | 2.03 | |