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Fig. 4 | Nanoscale Research Letters

Fig. 4

From: Step-and-Repeat Nanoimprint-, Photo- and Laser Lithography from One Customised CNC Machine

Fig. 4

a Screen capture of the microchannel mixer design being exposed with the laser lithography tool. Scale bar = 600 μm. b Photograph of a developed SU-8 pattern on Si. Scale bar = 2.5 mm. c Photograph of a relieved PDMS casting from the sample shown in b bonded to a quartz slide to seal the hollow channel. Scale bar = 2.5 mm. de Optical micrograph showing part of the design exposed via laser lithography into d S1805 and e Nano SU-8 post development. f Optical micrograph of the PDMS/quartz device shown in c. df At the same magnification, scale bar shown in d = 150 μm

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