Table 1 Performance characteristics of the custom-built multifunctional UV-lithography tool
From: Step-and-Repeat Nanoimprint-, Photo- and Laser Lithography from One Customised CNC Machine
Characteristic | Minimum | Maximum |
|---|---|---|
LED irradiance (mW/cm2) | 45.0 | 102.0 |
Laser power (mW) | 0.18 | 1.00 |
Imprinting load (kg) | 0.10 | High (not measured) |
Length displacement (mm) | 0.001 | 390.000a |
Breadth displacement (mm) | 0.001 | 290.000a |
Head speed (mm/s) | 0.001 | 25.000 |
Working temperature (°C) | Room Temperature | 150 |