Fig. 2
Top view SEM images of the fabrication process of VFS PZT NC arrays. a The pore-through AAO template with an enlarged pore diameter of about 80 nm. b AAO template with PZT sol-gel infiltration after the annealing process. c AAO template with embedded PZT nanostructure after etching off the PZT top layer on the top surface of AAO by an IBE. d VFS PZT NC arrays on Pt/Si substrate after selectively chemical etching off AAO. The scale bar is 100 nm