Fig. 4From: Silicon Substrate Strained and Structured via Cavitation Effect for Photovoltaic and Biomedical ApplicationMicro-Raman spectra measured around localized defects after MHz sonication (15 W/cm2, 30 min) and annealing: 1 336 cm−1, 2 412 cm−1, 3 642 cm−1, 4 971 cm−1. Spectrum of the untreated silicon is depicted as black. On the right of the micro-Raman spectra, the AFM images of the respective regions are depictedBack to article page