Fig. 6From: Low-Cost and High-Productivity Three-Dimensional Nanocapacitors Based on Stand-Up ZnO Nanowires for Energy StorageDependence of the leakage current density on voltage for the fabricated capacitors with different thicknesses of Al2O3 (5, 10, 15, and 20 nm) at room temperature. All the current-voltage measurements were performed on capacitors with a footprint size of 100 μm × 100 μmBack to article page