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Fig. 1 | Nanoscale Research Letters

Fig. 1

From: The Peculiarities of Strain Relaxation in GaN/AlN Superlattices Grown on Vicinal GaN (0001) Substrate: Comparative XRD and AFM Study

Fig. 1

The experimental ω − φ 2D intensity scattering maps of a GaN (0002) and b SL (0002) reflections for S20. The red curves are the fitted offset angles of α GaN and α SL with Eq. (1). The subtracted α GaN − α SL curve along with the φ-scan for GaN \( \left(10\overline{1}2\right) \) reflection is shown in c. The inset demonstrates the misorientation angles relative to the surface normal direction

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