Fig. 2From: The Peculiarities of Strain Relaxation in GaN/AlN Superlattices Grown on Vicinal GaN (0001) Substrate: Comparative XRD and AFM StudyThe \( \left(11\overline{2}4\right) \) RSMs of GaN buffer layers and GaN/AlN SLs for S5, S10, and S20. The vertical dashed lines indicate the Q x positions for GaN and SLsBack to article page