Fig. 3From: The Peculiarities of Strain Relaxation in GaN/AlN Superlattices Grown on Vicinal GaN (0001) Substrate: Comparative XRD and AFM StudyThe experimental (gray curves) and fitted (color curves) (0002) ω/2θ XRD spectra for each sample. The inset represents the (0002) ω-scans for the zero-order satellite peak of SLs along with the FWHM (Δω) presented for each sampleBack to article page