Fig. 5From: The Peculiarities of Strain Relaxation in GaN/AlN Superlattices Grown on Vicinal GaN (0001) Substrate: Comparative XRD and AFM StudyAFM image of the surfaces of the substrate GaN/Al2O3 (a) and the SL structures of AlN/GaN with 5, 10, and 20 periods, respectively, in b–d. The arrows indicate crystallographic directions and the direction of misorientation of substrateBack to article page