Fig. 6From: The Peculiarities of Strain Relaxation in GaN/AlN Superlattices Grown on Vicinal GaN (0001) Substrate: Comparative XRD and AFM StudyAFM images of surfaces of the AlN/GaN SL structures with 5, 10, and 20 periods, respectively, in a–c. The dotted lines mark the triangular-shaped areas of anisotropic step-flow growth resulting from the long-range pinning effects of the surface-terminated dislocationsBack to article page