Fig. 2From: Mechanisms of Low-Temperature Nitridation Technology on a TaN Thin Film Resistor for Temperature Sensor ApplicationsTCR value of the TaN thin film resistor. The TCR value was calculated from the relationship of resistance of the TaN thin film resistor at different temperatures (DC I-V sweeping voltage was set from 0 to −40 V). The temperature sensitivity of the TaN thin film resistor was enhanced about 10.2 % through SCCO2 nitridation technologyBack to article page