Fig. 2From: Droplet etching of deep nanoholes for filling with self-aligned complex quantum structuresDepth profiles along [110] and [1\(\bar 1\)0] direction of Al LDE nanoholes etched into AlGaAs at: θ = 1.0 ML, F As < 10 −7 Torr, and varied a T = 600 °C, b T = 630 °C, c T = 660 °CBack to article page