Fig. 5
From: Droplet etching of deep nanoholes for filling with self-aligned complex quantum structures
Influence of the temperature during LDE for θ = 1 ML and F As < 10 −7 Torr on a the average depth of the initial holes. The model results are calculated using Eq. 1, b the average energy of the QD ground-state emission, and c the average full width at half maximum (FWHM) of the exciton peak or the broad peak for T≥ 640 °C. Note the change of the scale indicated by the dashed line. d Typical single-dot PL spectrum with exciton (X) peak and higher excitonic complexes of a sample etched at T = 640 °C. The exciton peak has a FWHM of 75 μeV. e Typical single-dot PL spectrum with broad peak of a sample etched at T = 650 °C. The broad peak has a FWHM of about 7 meV