Fig. 2
From: Sensitive and Selective Detection of HIV-1 RRE RNA Using Vertical Silicon Nanowire Electrode Array
VSNEA fabrication process. a Vertical silicon nanowire grown on a (111) Si substrate. b First SiO2 passivation layer deposition with CVD. c Metal-coated SiNWs (Ti 10 nm and Au 80 nm). d Second SiO2 passivation layer deposition with CVD