Fig. 1
From: ZnO-Based Microcavities Sculpted by Focus Ion Beam Milling
Schematic illustration of single crystalline ZnO MC fabrication process. a The thin film was formed by carving into the ZnO substrate using conventional top-down FIB etching. b The pattern was defined and etched by standard ion beam milling. c FIB etching was further employed to realize the suspended ZnO MC. d The ZnO MC was picked up by using a glass tip