Table 1 Comparison between the calculated ΔS values and measured ΔS values of submicron Pd temperature sensors
From: Performance of Nano-Submicron-Stripe Pd Thin-Film Temperature Sensors
Width W1–W2 (nm) | 310–70 | 210–70 | 310–80 | 210–80 | 310–100 | 510–80 | 810–80 |
Calculated ΔS (μV/K) | 0.93 | 0.83 | 0.84 | 0.75 | 0.49 | 1.08 | 1.26 |
Measured ΔS (μV/K) | 0.96 ± 0.05 | 0.84 ± 0.04 | 0.82 ± 0.04 | 0.69 ± 0.04 | 0.50 ± 0.03 | 1.00 ± 0.05 | 1.22 ± 0.06 |