Fig. 1From: Porous NASICON-Type Li3Fe2(PO4)3 Thin Film Deposited by RF Sputtering as Cathode Material for Li-Ion MicrobatteriesXRD patterns of samples a LiFePO4 target, b as-deposited Li3Fe2(PO4)3, and c annealed Li3Fe2(PO4)3 at 700 °C for 3 hBack to article page