Fig. 2From: Streptavidin Modified ZnO Film Bulk Acoustic Resonator for Detection of Tumor Marker Mucin 1Characteristics of FBAR based on c-axis ZnO film: a the cross section scanning electron microscopy image, the insert is the G-S-G patterned Au electrode, b the amplification of ZnO piezoelectric film, c the XRD pattern of the device, and d the rocking curve of ZnO (002) peakBack to article page