Fig. 1From: Comparative Kinetic Analysis of Closed-Ended and Open-Ended Porous SensorsSEM images of a fabricated PSi membrane. a Cross-sectional SEM image of the open-ended PSi membrane region and the surrounding silicon substrate. The area below the ~15-μm-thick membrane is open to allow analyte to flow through the porous membrane. b Magnified cross-sectional SEM image showing the PSi layers comprising the microcavity and the surrounding sacrificial layers. c Top view SEM image of the PSi membraneBack to article page