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Fig. 1 | Nanoscale Research Letters

Fig. 1

From: Comparative Kinetic Analysis of Closed-Ended and Open-Ended Porous Sensors

Fig. 1

SEM images of a fabricated PSi membrane. a Cross-sectional SEM image of the open-ended PSi membrane region and the surrounding silicon substrate. The area below the ~15-μm-thick membrane is open to allow analyte to flow through the porous membrane. b Magnified cross-sectional SEM image showing the PSi layers comprising the microcavity and the surrounding sacrificial layers. c Top view SEM image of the PSi membrane

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