Fig. 3From: Recent Advances in Silicon Nanowire Biosensors: Synthesis Methods, Properties, and ApplicationsSilver-assisted chemical etching mechanism: Step (i) Deposition of silver nanoparticles on silicon surface. Step (ii) Generation of holes via the oxidation of silicon and etching by HF. Step (iii) Formation of SiNWs arrays leads to silver nanoparticle sinking. Step (iv) Newly formed SiNWs. The figure was reproduced from [15]Back to article page