Table 3 Showing SiNWs synthesis techniques
From: Recent Advances in Silicon Nanowire Biosensors: Synthesis Methods, Properties, and Applications
Techniques | Types | Material | References |
|---|---|---|---|
Bottom–up approach (Fig. 5) | Vapor-liquid-solid (VLS) Oxide assisted growth (OAG) Metal-assisted chemical etching | Coating-catalyzed metals on silicon substrate (CVD) Coating-catalyzed metals on silicon substrate-laser ablation Si wafer-coated metal catalyst introduced with Si gas source OAG-thermal evaporation OAG-HF Electroless metal deposition-chemical etching | [4] [27] |
Top–down approach (Fig. 4) | None | Electron beam lithography Nanoimprint lithography DEA technology and photolithography Photolithography-DRIE-TMAH-thermal oxidation Angled thin-film deposition-micrometer scale photolithography Lateral bridging growth | [28] [29] [30] [31] [32] |