Fig. 9From: Impacts of Annealing Conditions on the Flat Band Voltage of Alternate La2O3/Al2O3 Multilayer Stack StructuresO1s XPS spectra of samples S2, S6, and S7. The O1s spectra was fitted with four peaks (Si–O–Al, Al–O–Al, Al–O–La and La–O–La)Back to article page