Table 1 The structures and thicknesses of annealed samples S1~S5
Sample | Film structures | Thickness (nm) |
---|---|---|
S1 | 1 × (40-cycle Al2O3 + 40-cycle La2O3) | 7.06 |
S2 | 2 × (20-cycle Al2O3 + 20-cycle La2O3) | 7.02 |
S3 | 4 × (10-cycle Al2O3 + 10-cycle La2O3) | 6.99 |
S4 | 40 × (1-cycle Al2O3 + 1-cycle La2O3) | 7.57 |
S5 | 4 × (20-cycle Al2O3 + 20-cycle La2O3) | 13.4 |