Table 2 The annealing conditions and thicknesses of samples S2 and S6~S10
Sample | Temperature (°C) | Duration (s) | Thickness (nm) |
---|---|---|---|
S2 | 600 | 60 | 7.02 |
S6 | 700 | 60 | 7.21 |
S7 | 800 | 60 | 7.20 |
S8 | 600 | 30 | 7.08 |
S9 | 600 | 90 | 7.07 |
S10 | 600 | 120 | 7.12 |
Sample | Temperature (°C) | Duration (s) | Thickness (nm) |
---|---|---|---|
S2 | 600 | 60 | 7.02 |
S6 | 700 | 60 | 7.21 |
S7 | 800 | 60 | 7.20 |
S8 | 600 | 30 | 7.08 |
S9 | 600 | 90 | 7.07 |
S10 | 600 | 120 | 7.12 |