Table 1 Deposition parameters for samples, Al composition of AZO films via XPS, and film thicknesses fitted by SE
From: Effects of Al Doping on the Properties of ZnO Thin Films Deposited by Atomic Layer Deposition
Samples | DEZ-H2O/TMA-H2O cycle ratio | N1 | N2 | N | at. %Al | Thicknesses (nm) |
|---|---|---|---|---|---|---|
ZnO | – | – | 200 | 200 | – | 41.2 |
AZO 50:1 | 50:1 | 4 | 200 | 204 | 3.7 % | 41.7 |
AZO 20:1 | 20:1 | 10 | 200 | 210 | 4.9 % | 44.3 |
AZO 10:1 | 10:1 | 20 | 200 | 220 | 7.1 % | 46.8 |
AZO 5:1 | 5:1 | 40 | 200 | 240 | 12.7 % | 48.6 |