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Fig. 4 | Nanoscale Research Letters

Fig. 4

From: Role of Arsenic During Aluminum Droplet Etching of Nanoholes in AlGaAs

Fig. 4

Schematic cross-section of a (001) AlGaAs surface with Ga/Al (red) and As (blue) atoms. Dashed spheres mark lattice atoms. As atom (1) illustrates desorption from the As surface reservoir. The deposited As atom (2) can re-evaporate or react with an Al adatom. The mobile Al atom (3) is generated by deposition or detachment from a droplet and can attach to a droplet or react with an As atom. The corresponding rates are discussed in the text

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