Fig. 4From: Composition Analysis of III-Nitrides at the Nanometer Scale: Comparison of Energy Dispersive X-ray Spectroscopy and Atom Probe Tomography a Variation of the Ga++/Ga+ ratio during the evaporation of the volume shown in Fig. 3b. The trend of the average field is given by red dotted line. b Variation of the N/(Ga + Al) ratioBack to article page