Fig. 1From: CMOS-Compatible Fabrication for Photonic Crystal-Based Nanofluidic StructurePrinciple of PC-based nanofluidic structure. a PC-based nanofluidic structure with related parameters: SiO2 thickness dsub, grating period Λ, channel depth dg, Si3N4 thickness d0. b Schematic diagram of PC-based nanofluidic structureBack to article page