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Table 1 The parameters used in the oxidation time calculation

From: On-Demand Fabrication of Si/SiO2 Nanowire Arrays by Nanosphere Lithography and Subsequent Thermal Oxidation

Parameter

Description

Value

alpha(Pa−1)

Empirical parameter

1.5 × 10−8

h(m/s)

Surface mass transfer constant of oxidant

2.78 × 10−2

N(m3)

The number of oxidant molecules

2.25 × 1028

V s(m3)

Empirical parameters

2 × 10−29

V d(m3)

Empirical parameters

7.5 × 10−29

V k(m3)

Empirical parameters

2.5 × 10−29

V 0(m3)

Fitting parameters

3.4 × 10−28

k s(m/s)

Surface reaction rate constant

5 × 10−5

D 0(m2/s)

Diffusivity of oxidant

7.25 × 10−14

C 0*(m−3)

Oxidant solubility

5.5 × 1022

η 0 (Pa · s)

Oxide viscosity

7.6 × 1015

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