Fig. 4From: RBS Depth Profiling Analysis of (Ti, Al)N/MoN and CrN/MoN MultilayersXPS spectra of the (Ti, Al)N/MoN multilayer deposited at 2 rpm. (a) N1s, (b) Al 2p, (c) Ti 2p3/2, (d) Mo 3d5/2Back to article page