Fig. 5From: RBS Depth Profiling Analysis of (Ti, Al)N/MoN and CrN/MoN MultilayersRBS spectra of (Ti, Al)N/MoN multilayer at 2 rpm through incident 2.42 and 1.52 MeV Li2+ ions at 170°. a Initial energy E 0 = 2.42 MeV, the angle of incidence α = 0°. b E 0 = 2.42 MeV, α = 0°, 15°, 37°, and 53. c E 0 = 1.52 MeV, α = 0°, and d E 0 = 1.52 MeV, α = 0°, 15°, 37°, and 53°Back to article page