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Table 1 Percentage compositions of atomic atoms in LaxAlyO films

From: Effects of Rapid Thermal Annealing and Different Oxidants on the Properties of LaxAlyO Nanolaminate Films Deposited by Atomic Layer Deposition

Sample

 

La(at%)

Al(at%)

O(at%)

C(at%)

N(at%)

Sample A

Fresh

11.99

26.37

56.35

3.58

1.71

Anneal

11.28

27.14

57.48

2.64

1.46

Sample B

Fresh

11.96

26.69

57.24

2.79

1.32

Anneal

9.98

27.18

59.15

2.55

1.14

Sample C

Fresh

11.24

26.04

57.69

3.41

1.62

Anneal

11.03

26.58

58.17

2.85

1.37

Sample D

Fresh

9.75

27.17

58.61

1.83

2.64

Anneal

8.91

27.78

59.87

1.51

1.93

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