Table 1 Percentage compositions of atomic atoms in LaxAlyO films
Sample | La(at%) | Al(at%) | O(at%) | C(at%) | N(at%) | |
---|---|---|---|---|---|---|
Sample A | Fresh | 11.99 | 26.37 | 56.35 | 3.58 | 1.71 |
Anneal | 11.28 | 27.14 | 57.48 | 2.64 | 1.46 | |
Sample B | Fresh | 11.96 | 26.69 | 57.24 | 2.79 | 1.32 |
Anneal | 9.98 | 27.18 | 59.15 | 2.55 | 1.14 | |
Sample C | Fresh | 11.24 | 26.04 | 57.69 | 3.41 | 1.62 |
Anneal | 11.03 | 26.58 | 58.17 | 2.85 | 1.37 | |
Sample D | Fresh | 9.75 | 27.17 | 58.61 | 1.83 | 2.64 |
Anneal | 8.91 | 27.78 | 59.87 | 1.51 | 1.93 |