Fig. 4From: Direct Growth of Al2O3 on Black Phosphorus by Plasma-Enhanced Atomic Layer DepositionAFM images of Al2O3/BP samples with different deposition recipes at 200 °C. a 100 cycles Al2O3 on BP grown by PEALD with the pretreatment of 20 cycles O2 plasma. b 100 cycles Al2O3 on BP grown by PEALD without any pretreatment. c 100 cycles Al2O3 on BP grown by ALD with H2O as an oxygen precursorBack to article page