Fig. 5From: Direct Growth of Al2O3 on Black Phosphorus by Plasma-Enhanced Atomic Layer DepositionP 2p XPS spectra of the interface between Al2O3 and BP of samples at different deposition temperatures. P1a(P2p3/2)and P1b(P 2p1/2) represent phosphorus bonded to phosphorus; P2 and P3 represent the different oxidative species of PO x and P2O5, respectivelyBack to article page