Table 2 Surface integrity on different crystal directions
From: Anisotropy of Single-Crystal Silicon in Nanometric Cutting
(100)[0–10] | (100)[0-1-1] | (110)[−110] | (110)[00–1] | (111)[−101] | (111)[−12-1] | |
|---|---|---|---|---|---|---|
a-Si layer thickness/nm | 1.5 | 1.3 | 1.7 | 2 | 1.3 | 1.6 |
SSD layer thickness/nm | 7.9 | 8.5 | 12.5 | 6.2 | 11.1 | 8.6 |
Surface roughness/nm | 0.53 | 0.3 | 0.9 | 0.72 | 0.73 | 0.54 |