Table 1 Model condition and simulation parameters
Workpiece dimensions | 45 nm × 27 nm × 12 nm |
|---|---|
Tool edge radius | 10 nm |
Tool nose radius | 10 nm |
Tool clearance angle | 15° |
Cutting direction | [100] and [101] on the (010) plane |
\( \left[\overline{1}01\right] \) and [010] on the (101) plane | |
\( \left[1\overline{2}1\right] \) and \( \left[\overline{1}01\right] \) on the (111) plane | |
Depth of cut | 3 nm |
Initial bulk temperature | 293 K |
Parameters of C-Ge morse potential | |
De = 0.125778 eV, α = 2.58219 Å−1, r 0 = 2.2324 Å [23] | |