Fig. 6From: PEALD-Grown Crystalline AlN Films on Si (100) with Sharp Interface and Good UniformityCross-sectional TEM images of the 87-nm AlN thin film. a Cross-sectional TEM image and (inset) lower magnification cross-sectional TEM image. b Cross-sectional HR-TEM image of the same sample and (inset) SAED pattern of Si (100) substrate. c SAED pattern of the same sample. d Cross-sectional HR-TEM image and (inset) magnification of the selected square areaBack to article page