Table 2 The extracted thickness of the 2-inch size AlN film at different points
From: PEALD-Grown Crystalline AlN Films on Si (100) with Sharp Interface and Good Uniformity
Thickness/nm | 86.1 | 86.5 | 86.8 | 86.7 | 87.0 | 86.8 | 86.5 |
Points | 1 | 2 | 3 | 4 | 5 | 6 | 7 |
From: PEALD-Grown Crystalline AlN Films on Si (100) with Sharp Interface and Good Uniformity
Thickness/nm | 86.1 | 86.5 | 86.8 | 86.7 | 87.0 | 86.8 | 86.5 |
Points | 1 | 2 | 3 | 4 | 5 | 6 | 7 |