Table 2 Calculated fixed charge density (Q f ) and interface defect density (D it ) from C-V measurement of the HfO2 thin films
Sample | Fixed charge density, Q f (×1012 cm−2) | Interface defect density, D it (×1013 eV−1 cm−2) |
---|---|---|
SO | 12.0 | 5.21 |
SO-A400 | 8.22 | 4.73 |
SO-A450 | 6.13 | 4.42 |
SO-A500 | 3.82 | 3.82 |